SCANNING AUGER SPECTROSCOPY 
Features:  
- An analytical technique thta uses a primary electron beam to 
  probe the surface of a solid material  
- Secondary electrons that are emitted as a result of the Auger 
  process are analyzed and their kinetic energy is determined
Specifications:   
- Elements detected: Li ~ U  - Detection Limits: 0.01 ~ 1 at%  - Depth resolution: 20 ~ 60 A  
- Probe size: < 15nm    
Sample Requirements:  
- Conductive  
- Vacuum compatible  
- Maximum sample size of 20mm(L) x 20mm(W) x 10mm(H)
Applications:   
- Elemental Surface Scan  
- Depth Profiling  
- Elemental Mapping
Element Mapping of Defect on Hard Disk Media
 
X-RAY PHOTOELECTRON SPECTROSCOPY

Features:  
- Samples are irradiated with X-ray which cause the ejection of photoelectrons from the surface 
- Secondary the electron binding energies are used to identify the elements present and, in many cases, 
  provide information about the valence state(s) or chemical bonding    environment(s) of the elements thus detected
Specifications:   
- Elements detected: Li ~ U  
- Detection Limits: 0.01 ~ 1 at%  
- Depth resolution: 20 ~ 60 A  
- Probe size: 50 um ~ 10mm    
Sample Requirements:  
- Conductors or insulators  
- Vacuum compatible  
- Maximum sample size of 40mm(L) x 40mm(W) x 3mm(H)
Applications:   
- Provide elemental information on surface contaminants  
- Determination of valence states and/or bonding environment of atoms near the surfaces 
- Identifies organic functional groups in polymers or other organic surfaces
 
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