SCANNING ELECTRON MICROSCOPY & EDX ANALYSIS
 
Features:  
- High spatial resolution (< 1nm)  
- High Depth of Focus (> 1um)  
- Can perform elemental X-ray analysis on micron particles 
 - Can be used as an excitation source for electrical testing and failure analysis
    
Specifications:  * SEM 
 - Image Resolution    
+ 1.5nm or better (at 15 kV)    
+ 4.0nm or better (at 1 kV)  
- Magnification: 20x ~ 500,000x 
 - Accelerating voltage: 0.5 ~ 30 kV (0.1 kV/step)
 
Application:  
* Topography Contrast  
- Grain Size  
- Surface Structure  
* Atomic Contrast  
- Boundary of two dissimilar elements  
- Phase analysis  
* Elemental and Chemical Analysis (using energy dispersive x-ray detector)  
- Contamination analysis
 
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