SCANNING OPTICAL MICROSCOPY

Features:  
- Multi-laser NIR scanning optical microscope  
- 1064nm laser (capable of electron-hole pair generation through backside silicon)  
- 1340nm laser (high resolution thermal probe which allows localized heating)  
- High laser power @ DUT  - Able to use with the techniques like TIVA, LIVA, SEI, OBIRCH and SCOBIC)  
- Navigation camera for real time backside imaging to complement the slow scanrate of laser scan module

Application: Scanned NIR laser activity localize failures which are sensitive to electron-hole pair generation of thermal stimulation.

Reflected SOM image 
of IC using 100x 
objective zoom 2x 
with 1064 laser

Frontside laser reflected 
laser  imge of an area 
in a CMOS  device and 
showing "Well"

Frontside & Backside SCOBIC

Features: 
- High Numerical Aperture (NA)  
- Long working distance (WD) 
- High Sensitivity Macro Lens  
- High Sensitivity Detector (Cooled CCD Camera & InGaAs Camera)  
- Real Time Backside Imaging

Application:   For localization of detection semiconductor devices caused by leaked junctions, contact spiking, latch up, oxide breakdown,   
and other current leakage phenomenon that produce light emission.

Frontside Emission

Backside Emission

Emission image @
10x magnification

Emission image @
20x magnification

Emission image @
50x magnification